Running discharge for PECVD inner coating of metal tubes

Hytry, R.; Möller, W.; Wilhelm, R.

doi:10.1016/0257-8972(95)08368-5

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Running discharge for PECVD inner coating of metal tubes

Hytry, R., Möller, W., & Wilhelm, R. (1995). Running discharge for PECVD inner coating of metal tubes. Surface & Coatings Technology, (1-3), 43-48. doi:10.1016/0257-8972(95)08368-5.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8E85-5 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8E86-3

Genre: Journal Article

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Creators:
Hytry, R.¹, Author
Möller, W.², Author
Wilhelm, R.³, Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
3Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856318

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Free keywords: 4th International Conference on Plasma Surface Engineering, Garmisch-Partenkirchen, Germany, 1994-09-19 to 1994-09-23

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Language(s): eng - English

Dates: Date issued: 1995

Publication Status: Issued

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Rev. Type: Peer

Identifiers: eDoc: 627671
DOI: 10.1016/0257-8972(95)08368-5
URI: http://www.sciencedirect.com/science/article/pii/0257897295083685

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Title: Surface & Coatings Technology

Source Genre: Journal

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Pages: - Volume / Issue: (1-3) Sequence Number: - Start / End Page: 43 - 48 Identifier: -