Deposition of hydrogenated carbon layers from CH3+ ion beams

Wang, W. M.; Eckstein, W.; Schwörer, R.; Plank, H.; Roth, J.

doi:10.1016/0022-3115(94)00468-4

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Deposition of hydrogenated carbon layers from CH3+ ion beams

Wang, W. M., Eckstein, W., Schwörer, R., Plank, H., & Roth, J. (1995). Deposition of hydrogenated carbon layers from CH3+ ion beams. Journal of Nuclear Materials, 220-222, 1033-1037. doi:10.1016/0022-3115(94)00468-4.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8EDF-E Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-E366-A

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Urheber:
Wang, W. M.¹, Autor
Eckstein, W.², Autor
Schwörer, R.², Autor
Plank, H.², Autor
Roth, J.², Autor

Affiliations:
1Max Planck Society, ou_persistent13
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

Inhalt

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Schlagwörter: 11th International Conference on Plasma Surface Interactions in Controlled Fusion Devices (PSI 11), Mito, Japan, 1994-05-23 to 1994-05-27

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