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  The role of ions the deposition of hydrocarbon films, investigated by in situ ellipsometry

Keudell, A. v. (1995). The role of ions the deposition of hydrocarbon films, investigated by in situ ellipsometry. In H. Atwater, J. Dickinson, & D. Lowndes (Eds.), Film Synthesis and Growth using Energetic Beams (pp. 355-366).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8F89-6 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0027-8F8A-4
Genre: Book Chapter

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 Creators:
Keudell, A. von1, Author           
Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288              

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Free keywords: Symposium on Film Synthesis and Growth Using Energetic Beams, San Francisco, CA, 1995-04-17 to 1995-04-20
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Language(s): eng - English
 Dates: 1995
 Publication Status: Issued
 Pages: -
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: eDoc: 628146
 Degree: -

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Title: Film Synthesis and Growth using Energetic Beams
Source Genre: Book
 Creator(s):
Atwater, HA, Editor
Dickinson, JT, Editor
Lowndes, DH, Editor
Affiliations:
-
Publ. Info: -
Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 355 - 366 Identifier: -

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Title: Materials Research Society Symposium Proceedings
Source Genre: Series
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Publ. Info: -
Pages: - Volume / Issue: 388 Sequence Number: - Start / End Page: - Identifier: -