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キーワード:
hydrogen beam source atomic-hydrogen surface-waves radio-frequency h-atom gas temperature surfatron density h-2
要旨:
The design of a microwave source in which a discharge is initiated by an electromagnetic surface wave at 2.45 GHz is described. A stable discharge was supported at a gas pressure p (0) exceeding the atmospheric pressure in He, N-2, and in H-2-Ar, H-2-He, and O-2-He mixtures in a 2-mm inner diameter quartz tube with a 0.15-mm diameter nozzle at a 50- to 115-W microwave power. A degree of dissociation of up to 80% was reached for pure H-2 at p (0) = 6 Torr and a 6% mixture of H-2 and He at p (0) = 50 Torr. When p (0) increases to 19 Torr for H-2 and to 300 Torr for the mixture, the hydrogen-atom beam intensity, in spite of a decrease in the degree of dissociation, increases due to narrowing of the beam particle velocity distribution.
