Sputtering Yield of Cu and Ag at Target Temperatures Close to the Melting Point

Bohdansky, J.; Lindner, H.; Hechtl, E.; Martinelli, A.P.; Roth, J.

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Sputtering Yield of Cu and Ag at Target Temperatures Close to the Melting Point

Bohdansky, J., Lindner, H., Hechtl, E., Martinelli, A., & Roth, J. (1987). Sputtering Yield of Cu and Ag at Target Temperatures Close to the Melting Point. Nuclear Instruments and Methods in Physics Research. B, 18, 509-514.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A31D-E Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A31E-C

Genre: Journal Article

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Creators:
Bohdansky, J.¹, Author
Lindner, H.², Author
Hechtl, E.³, Author
Martinelli, A.P.³, Author
Roth, J.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Max Planck Institute for Plasma Physics, ou_persistent27
3External Organizations, ou_persistent22

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Dates: Date issued: 1987

Publication Status: Issued

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Title: Nuclear Instruments and Methods in Physics Research. B

Source Genre: Journal

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Pages: - Volume / Issue: 18 Sequence Number: - Start / End Page: 509 - 514 Identifier: -