Sputtering Yield of Cu and Ag at Target Temperatures Close to the Melting Point

Bohdansky, J.; Lindner, H.; Hechtl, E.; Martinelli, A.P.; Roth, J.

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Sputtering Yield of Cu and Ag at Target Temperatures Close to the Melting Point

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Bohdansky, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Roth, J.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Bohdansky, J., Lindner, H., Hechtl, E., Martinelli, A., & Roth, J. (1987). Sputtering Yield of Cu and Ag at Target Temperatures Close to the Melting Point. Nuclear Instruments and Methods in Physics Research. B, 18, 509-514.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-A31D-E

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