Computer Simulation of Preferential Sputtering

Eckstein, W.; Moeller, W.

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Computer Simulation of Preferential Sputtering

Eckstein, W., & Moeller, W. (1985). Computer Simulation of Preferential Sputtering. Nuclear Instruments and Methods in Physics Research. B, 7/8, 727.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A349-8 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-A34A-6

Genre: Journal Article

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Creators:
Eckstein, W.¹, Author
Moeller, W.¹, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1985

Publication Status: Issued

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Title: Nuclear Instruments and Methods in Physics Research. B

Source Genre: Journal

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Pages: - Volume / Issue: 7/8 Sequence Number: - Start / End Page: 727 Identifier: -