A Study of the Neutral Species rf Sputtered from Oxide Target

Coburn, J.W.; Taglauer, E.; Kay, E.

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A Study of the Neutral Species rf Sputtered from Oxide Target

Coburn, J., Taglauer, E., & Kay, E. (1975). A Study of the Neutral Species rf Sputtered from Oxide Target. In Vacuum (pp. 501-504).

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B719-A Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-B71A-8

Genre: Conference Paper

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Creators:
Coburn, J.W.¹, Author
Taglauer, E.², Author
Kay, E.¹, Author

Affiliations:
1External Organizations, ou_persistent22
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1975

Publication Status: Issued

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Title: Vacuum

Place of Event: Kyoto (JP)

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Title: Vacuum

Source Genre: Proceedings

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Pages: - Volume / Issue: - Sequence Number: - Start / End Page: 501 - 504 Identifier: -