Deceleration Ion Optical Systems for Sputtering Measurements between 50 eV as 
Function of Angle of Incidence

Liebl, H.; Bohdansky, J.; Roth, J.; Dose, V.

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Deceleration Ion Optical Systems for Sputtering Measurements between 50 eV as Function of Angle of Incidence

Liebl, H., Bohdansky, J., Roth, J., & Dose, V. (1987). Deceleration Ion Optical Systems for Sputtering Measurements between 50 eV as Function of Angle of Incidence. Review of Scientific Instruments, 58, 10, 1830-1832.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-BD89-9 Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-BD8C-3

Genre: Journal Article

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Creators:
Liebl, H.¹, Author
Bohdansky, J.¹, Author
Roth, J.¹, Author
Dose, V.^{1, 2}, Author

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1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856284

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Dates: Date issued: 1987

Publication Status: Issued

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Title: Review of Scientific Instruments

Source Genre: Journal

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Pages: - Volume / Issue: 58, 10 Sequence Number: - Start / End Page: 1830 - 1832 Identifier: -