The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon 
Films

Reinke, P.; Jacob, W.; Moeller, W.

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The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films

Reinke, P., Jacob, W., & Moeller, W. (1993). The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films. Journal of Applied Physics, 74, 2, 1354-1361.

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Datensatz-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CBCD-F Versions-Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CBCE-D

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Urheber:
Reinke, P.¹, Autor
Jacob, W.², Autor
Moeller, W.², Autor

Affiliations:
1Max Planck Institute for Plasma Physics, ou_persistent27
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288