The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon 
Films

Reinke, P.; Jacob, W.; Moeller, W.

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The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films

Reinke, P., Jacob, W., & Moeller, W. (1993). The Influence of the Ion Energy on the Growth and Structure of Thin Hydrocarbon Films. Journal of Applied Physics, 74, 2, 1354-1361.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CBCD-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-0028-CBCE-D

Genre: Journal Article

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Creators:
Reinke, P.¹, Author
Jacob, W.², Author
Moeller, W.², Author

Affiliations:
1Max Planck Institute for Plasma Physics, ou_persistent27
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Dates: Date issued: 1993

Publication Status: Issued

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Title: Journal of Applied Physics

Source Genre: Journal

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Pages: - Volume / Issue: 74, 2 Sequence Number: - Start / End Page: 1354 - 1361 Identifier: -