Oberflächenprozesse beim Wachstum von a-C:H-Schichten in gepulsten Plasmen

Bauer, M.

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Oberflächenprozesse beim Wachstum von a-C:H-Schichten in gepulsten Plasmen

Bauer, M. (2003). Oberflächenprozesse beim Wachstum von a-C:H-Schichten in gepulsten Plasmen. Talk presented at 11. Bundesdeutsche Fachtagung Plasmatechnologie. Ilmenau. 2003-03-09 - 2003-03-12.

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Item Permalink: https://hdl.handle.net/11858/00-001M-0000-002E-92AC-F Version Permalink: https://hdl.handle.net/11858/00-001M-0000-002E-92AD-D

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Creators:
Bauer, M.^{1, 2}, Author

Affiliations:
1Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325
2Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288

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Language(s): deu - German

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Identifiers: eDoc: 112117

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Title: 11. Bundesdeutsche Fachtagung Plasmatechnologie

Place of Event: Ilmenau

Start-/End Date: 2003-03-09 - 2003-03-12

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