Deposition and erosion of hydrocarbon films with nitrogen containing 
hydrocarbon plasmas

Schwarz-Selinger, T.; Hopf, C.; Jacob, W.

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Deposition and erosion of hydrocarbon films with nitrogen containing hydrocarbon plasmas

Schwarz-Selinger, T., Hopf, C., & Jacob, W. (2004). Deposition and erosion of hydrocarbon films with nitrogen containing hydrocarbon plasmas. Poster presented at 16th International Conference on Plasma Surface Interactions in Controlled Fusion Devices (PSI 16), Portland, Maine.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0000-054B-7 Version Permalink: https://hdl.handle.net/21.11116/0000-0000-054C-6

Genre: Poster

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Creators:
Schwarz-Selinger, T.^{1, 2}, Author
Hopf, C.^{1, 2}, Author
Jacob, W.^{1, 2}, Author

Affiliations:
1Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856288
2Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society, ou_2074325

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Language(s): eng - English

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Publication Status: Not specified

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Identifiers: eDoc: 118500

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Title: 16th International Conference on Plasma Surface Interactions in Controlled Fusion Devices (PSI 16)

Place of Event: Portland, Maine

Start-/End Date: 2004-05-24 - 2004-05-28

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