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  Zeitaufgelöste Messungen von transienten und stabilen Spezies in gepulsten induktiv gekoppelten Argon/Methan Entladungen

Vartolomei, V., Schwarz-Selinger, T., & Jacob, W. (2006). Zeitaufgelöste Messungen von transienten und stabilen Spezies in gepulsten induktiv gekoppelten Argon/Methan Entladungen. Talk presented at 13. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen. Mühlleithen. 2006-03-13 - 2006-03-16.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0000-12DE-2 Version Permalink: https://hdl.handle.net/21.11116/0000-0000-12DF-1
Genre: Talk

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 Creators:
Vartolomei, V.1, Author           
Schwarz-Selinger, T.2, Author           
Jacob, W.2, Author           
Affiliations:
1External Organizations, ou_persistent22              
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              

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Language(s): deu - German
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 Identifiers: eDoc: 250916
URI: http://www.iom-leipzig.de/muehlleithen/2006/index.cfm
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Title: 13. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen
Place of Event: Mühlleithen
Start-/End Date: 2006-03-13 - 2006-03-16

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