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Zeitaufgelöste Messungen von transienten und stabilen Spezies in gepulsten induktiv gekoppelten Argon/Methan Entladungen

MPS-Authors
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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Vartolomei, V., Schwarz-Selinger, T., & Jacob, W. (2006). Zeitaufgelöste Messungen von transienten und stabilen Spezies in gepulsten induktiv gekoppelten Argon/Methan Entladungen. Talk presented at 13. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen. Mühlleithen. 2006-03-13 - 2006-03-16.


Cite as: https://hdl.handle.net/21.11116/0000-0000-12DE-2
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