Ion chemistry in argon hydrogen and argon nitrogen inductively coupled plasmas

Sode, M.

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Ion chemistry in argon hydrogen and argon nitrogen inductively coupled plasmas

Sode, M. (2011). Ion chemistry in argon hydrogen and argon nitrogen inductively coupled plasmas. Talk presented at Seminar "Plasmaphysik und Plasmatechnik". Universität Kiel. 2011-11-17.

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Datensatz-Permalink: https://hdl.handle.net/21.11116/0000-0000-5F91-2 Versions-Permalink: https://hdl.handle.net/21.11116/0000-0000-5F92-1

Genre: Vortrag

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Urheber:
Sode, M.^{1, 2}, Autor

Affiliations:
1Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328