Ion chemistry in argon hydrogen and argon nitrogen inductively coupled plasmas

Sode, M.

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Ion chemistry in argon hydrogen and argon nitrogen inductively coupled plasmas

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Sode, M.
Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society;
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Sode, M. (2011). Ion chemistry in argon hydrogen and argon nitrogen inductively coupled plasmas. Talk presented at Seminar "Plasmaphysik und Plasmatechnik". Universität Kiel. 2011-11-17.

Cite as: https://hdl.handle.net/21.11116/0000-0000-5F91-2

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