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  Ion chemistry in argon hydrogen and argon nitrogen inductively coupled plasmas

Sode, M. (2011). Ion chemistry in argon hydrogen and argon nitrogen inductively coupled plasmas. Talk presented at Seminar "Plasmaphysik und Plasmatechnik". Universität Kiel. 2011-11-17.

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 Creators:
Sode, M.1, 2, Author           
Affiliations:
1Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327              
2Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856328              

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Language(s): eng - English
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 Publication Status: Not specified
 Pages: -
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 Table of Contents: -
 Rev. Type: -
 Identifiers: eDoc: 573236
 Degree: -

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Title: Seminar "Plasmaphysik und Plasmatechnik"
Place of Event: Universität Kiel
Start-/End Date: 2011-11-17

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