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  Electron-induced crosslinking of aromatic self-assembled monolayers: Negative resists for nanolithography

Geyer, W., Stadler, V., Eck, W., Zharnikov, M., Gölzhäuser, A., & Grunze, M. (1999). Electron-induced crosslinking of aromatic self-assembled monolayers: Negative resists for nanolithography. Applied Physics Letters, 75(16), 2401-2403. doi:10.1063/1.125027.

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Genre: Journal Article
Alternative Title : Electron induced crosslinking of aromatic self-assembled monolayers: negative resists for nanolithography

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ApplPhysLett_75_1999_2401.pdf (Any fulltext), 294KB
 
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 Creators:
Geyer, W., Author
Stadler, V., Author
Eck, W., Author
Zharnikov, M., Author
Gölzhäuser, A., Author
Grunze, M.1, Author           
Affiliations:
1Cellular Biophysics, Max Planck Institute for Medical Research, Max Planck Society, ou_2364731              

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 Abstract: We have explored the interaction of self-assembled monolayers of 1,1′-biphenyl-4-thiol (BPT) with low energy electrons. X-ray photoelectron, infrared, and near edge x-ray absorption fine structure spectroscopy showed that BPT forms well-ordered monolayers with the phenyl rings tilted ∼15° from the surface normal. The films were exposed to 50 eV electrons and changes were monitored in situ. Even after high (∼10 mC/cm2) exposures, the molecules maintain their preferred orientation and remain bonded on the gold substrate. An increased etching resistance and changes in the infrared spectra imply a crosslinking between neighboring phenyl groups, which suggests that BPT can be utilized as an ultrathin negative resist. This is demonstrated by the generation of patterns in the underlying gold.

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Language(s): eng - English
 Dates: 1999-06-211999-08-041999-10-18
 Publication Status: Issued
 Pages: 3
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 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1063/1.125027
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Title: Applied Physics Letters
  Abbreviation : Appl. Phys. Lett.
Source Genre: Journal
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Publ. Info: Melville, NY : American Institute of Physics
Pages: - Volume / Issue: 75 (16) Sequence Number: - Start / End Page: 2401 - 2403 Identifier: Other: 0003-6951
CoNE: https://pure.mpg.de/cone/journals/resource/954922836223