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  Rutherford backscattering spectrometry analysis of InGaAs nanostructures

Laricchiuta, G., Vandervorst, W., Vickridge, I., Mayer, M., & Meersschaut, J. (2019). Rutherford backscattering spectrometry analysis of InGaAs nanostructures. Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films, 37: 020601. doi:10.1116/1.5079520.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0002-EF9D-1 Version Permalink: https://hdl.handle.net/21.11116/0000-0003-16BA-3
Genre: Journal Article

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laricchiuta_rutherford.pdf (Supplementary material), 586KB
 
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 Creators:
Laricchiuta, G.1, Author
Vandervorst, W.1, Author
Vickridge, I.1, Author
Mayer, M.2, Author           
Meersschaut, J.1, Author
Affiliations:
1external, ou_persistent22              
2Plasma Edge and Wall (E2M), Max Planck Institute for Plasma Physics, Max Planck Society, ou_1856327              

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Language(s): eng - English
 Dates: 20182019
 Publication Status: Issued
 Pages: -
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 Rev. Type: Peer
 Identifiers: DOI: 10.1116/1.5079520
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Title: Journal of Vacuum Science and Technology A: Vacuum, Surfaces, and Films
  Other : J. Vac. Sci. Technol. A: Vac. Surf. Films
Source Genre: Journal
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Publ. Info: New York : Published by AVS through the American Institute of Physics
Pages: - Volume / Issue: 37 Sequence Number: 020601 Start / End Page: - Identifier: ISSN: 0734-2101
CoNE: https://pure.mpg.de/cone/journals/resource/954928495416_2