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キーワード:
optical metrology, on-chip integration, Huygens dipoles, integrated displacement sensor, photonic crystal waveguide
要旨:
The field of optical metrology with its high precision position, rotation and wavefront sensors represents the basis for lithography and high resolution microscopy. However, the on-chip integration - a task highly relevant for future nanotechnological devices - necessitates the reduction of the spatial footprint of sensing schemes by the deployment of novel concepts. A promising route towards this goal is predicated on the controllable directional emission of the fundamentally smallest emitters of light, i.e. dipoles, as an indicator. Here we realize an integrated displacement sensor based on the directional emission of Huygens dipoles excited in an individual dipolar antenna. The position of the antenna relative to the excitation field determines its directional coupling into a six-way crossing of photonic crystal waveguides. In our experimental study supported by theoretical calculations, we demonstrate the first prototype of an integrated displacement sensor with a standard deviation of the position accuracy below λ/300 at room temperature and ambient conditions.
