Novel test sample for submicron ion-beam analysis

Spemann, D.; Reinert, Tilo; Vogt, J.; Butz, T.; Otte, K.; Zimmer, K.

doi:10.1016/S0168-583X(01)00362-7

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Novel test sample for submicron ion-beam analysis

Spemann, D., Reinert, T., Vogt, J., Butz, T., Otte, K., & Zimmer, K. (2001). Novel test sample for submicron ion-beam analysis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 181(1-4), 186-192. doi:10.1016/S0168-583X(01)00362-7.

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Item Permalink: https://hdl.handle.net/21.11116/0000-0004-C4FF-0 Version Permalink: https://hdl.handle.net/21.11116/0000-0004-C500-D

Genre: Journal Article

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Creators:
Spemann, D.¹, Author
Reinert, Tilo¹, Author
Vogt, J.¹, Author
Butz, T.¹, Author
Otte, K.², Author
Zimmer, K.², Author

Affiliations:
1Nukleare Festkörperphysik, University of Leipzig, Germany, ou_persistent22
2Abt. Ionenstrahltechnik, Institut für Oberflächenmodifizierung e.V., Leipzig, Germany, ou_persistent22

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Free keywords: Test sample; Electron beam lithography; Submicron beam spot sizes; Properties of scanning system; Beam profile

Abstract: In order to determine the beam spot size, scan size and scanning properties of a nuclear microprobe system a novel test sample with nanometer structures for the use in submicron ion--beam analysis has been developed by the University of...

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Language(s): eng - English

Dates: Published Online: 2001-09-06Date issued: 2001-07

Publication Status: Issued

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Rev. Type: Peer

Identifiers: DOI: 10.1016/S0168-583X(01)00362-7
BibTex Citekey: Spemann:2001

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Title: Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms

Abbreviation : NIM B

Source Genre: Journal

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Publ. Info: Amsterdam : Elsevier B.V.

Pages: - Volume / Issue: 181 (1-4) Sequence Number: - Start / End Page: 186 - 192 Identifier: ISSN: 0168-583X
CoNE: https://pure.mpg.de/cone/journals/resource/954925484704