English
 
Help Privacy Policy Disclaimer
  Advanced SearchBrowse

Item

ITEM ACTIONSEXPORT
 
 
DownloadE-Mail
 Local TagsRelease HistoryDetailsSummary
  Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper

Dogan, G., Chiu, F., Chen, S. U. H., David, M. R. T., Michalowski, A., Schänzel, M., et al. (2021). Micromachining of Al2O3 thin films via laser drilling and plasma etching for interfacing copper. Materials & Design, 210: 110114. doi:10.1016/j.matdes.2021.110114.

Item is

 

show all hide all

Basic

show hide
Item Permalink: https://hdl.handle.net/21.11116/0000-0009-2E5D-D Version Permalink: https://hdl.handle.net/21.11116/0000-0009-2E5E-C
Genre: Journal Article

Files

show Files

Locators

show

Creators

show
hide
 Creators:
Dogan, G.1, 2, Author           
Chiu, F.3, Author
Chen, S. U. H.3, Author
David, M. R. T.2, Author
Michalowski, A.4, Author
Schänzel, M.4, Author
Silber, C.2, Author
Schütz, G.1, Author           
Grévent, C.2, Author
Keskinbora, K.1, 5, Author           
Affiliations:
1Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society, ou_1497648              
2Robert Bosch GmbH, Automotive Electronics, Postfach 13 42, 72703 Reutlingen, Germany, ou_persistent22              
3Advanced Semiconductor Engineering Inc., , No.26, Chin 3rd Rd, N.E.P.Z., Nantze, Kaohsiung, Taiwan, ou_persistent22              
4Robert Bosch GmbH, Corporate Sector Research and Advance Engineering, Robert-Bosch-Campus 1, 71272 Stuttgart, Germany, ou_persistent22              
5Massachusetts Institute of Technology, 77 Mass Avenue, Cambridge, MA 02139, USA, ou_persistent22              

Content

show
hide
Free keywords: Abt. Schütz
 Abstract: -

Details

show
hide
Language(s): eng - English
 Dates: 2021-09-14
 Publication Status: Published online
 Pages: 11
 Publishing info: -
 Table of Contents: -
 Rev. Type: Peer
 Identifiers: DOI: 10.1016/j.matdes.2021.110114
 Degree: -

Event

show

Legal Case

show

Project information

show

Source 1

show
hide
Title: Materials & Design
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: Elsevier Ltd.
Pages: - Volume / Issue: 210 Sequence Number: 110114 Start / End Page: - Identifier: ISSN: 0264-1275
CoNE: https://pure.mpg.de/cone/journals/resource/0264-1275