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  In situ Thermal Refractive Index Trimming of Silicon Nitride Waveguides with Suspended Heaters

Xue, T., Poon, J. K. S., & Sacher, W. D. (2023). In situ Thermal Refractive Index Trimming of Silicon Nitride Waveguides with Suspended Heaters. In CLEO: Science and Innovations 2023. Optica Publishing Group. doi:10.1364/CLEO_SI.2023.STu3J.4.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000E-6A2A-D Version Permalink: https://hdl.handle.net/21.11116/0000-000E-6A2B-C
Genre: Conference Paper

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cleo_si-2023-stu3j.4.pdf (Publisher version), 2MB
 
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https://doi.org/10.1364/CLEO_SI.2023.STu3J.4 (Publisher version)
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 Creators:
Xue, Tianyuan1, Author           
Poon, Joyce K. S.1, Author                 
Sacher, Wesley D.1, Author                 
Affiliations:
1Nanophotonics, Integration, and Neural Technology, Max Planck Institute of Microstructure Physics, Max Planck Society, ou_3287471              

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 Abstract: We demonstrate low-power thermal refractive index trimming of silicon nitride waveguides using suspended heaters. An average effective index change of -2.6×10-3 was achieved at a wavelength of 1550 nm with a power dissipation of 40mW after 1.5 hours.

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 Dates: 2023
 Publication Status: Published online
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 Identifiers: DOI: 10.1364/CLEO_SI.2023.STu3J.4
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Title: Conference on Lasers and Electro-Optics
Place of Event: San Jose, California United States
Start-/End Date: 2023-05-07 - 2023-05-12

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Title: CLEO: Science and Innovations 2023
Source Genre: Proceedings
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Publ. Info: Optica Publishing Group
Pages: - Volume / Issue: - Sequence Number: STu3J.4 Start / End Page: - Identifier: ISBN: 978-1-957171-25-8