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  Development of combinatorial methods to tailor electrical and mechanical properties of Cu-based thin-film structures

Oellers, T. (2022). Development of combinatorial methods to tailor electrical and mechanical properties of Cu-based thin-film structures. PhD Thesis, Ruhr-Universität Bochum.

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Item Permalink: https://hdl.handle.net/21.11116/0000-000E-7C3B-6 Version Permalink: https://hdl.handle.net/21.11116/0000-000E-7C3F-2
Genre: Thesis

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Diss-Tobias-Oellers.pdf (Publisher version), 34MB
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 Creators:
Oellers, Tobias1, Author           
Ludwig, Alfred2, Referee           
Dehm, Gerhard3, Referee           
Affiliations:
1Institute for Materials, Ruhr-Universität Bochum, 44801 Bochum, Germany, ou_persistent22              
2Chair for MEMS Materials, Institute for Materials, Ruhr-Universität Bochum, 44801 Bochum, Germany und Materials Research Department, Ruhr-Universität Bochum, 44801 Bochum, Germany, ou_persistent22              
3Structure and Nano-/ Micromechanics of Materials, Max-Planck-Institut für Eisenforschung GmbH, Max Planck Society, ou_1863398              

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Free keywords: Dr.-Ing.
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Language(s): eng - English
 Dates: 2022-05-13
 Publication Status: Accepted / In Press
 Pages: -
 Publishing info: Ruhr-Universität Bochum
 Table of Contents: -
 Rev. Type: -
 Identifiers: DOI: 10.13154/294-8917
 Degree: PhD

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