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  Liquid precursor 2-step aluminum thin film deposition on KrF laser patterned palladium.

Lehmann, O., & Stuke, M. (1992). Liquid precursor 2-step aluminum thin film deposition on KrF laser patterned palladium. Applied Physics Letters, 61(17), 2027-2029.

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Item Permalink: http://hdl.handle.net/11858/00-001M-0000-0013-08C1-E Version Permalink: http://hdl.handle.net/11858/00-001M-0000-0027-DE88-3
Genre: Journal Article

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 Creators:
Lehmann, O.1, Author              
Stuke, M.1, Author              
Affiliations:
1Research Group of Laser Chemical Processing, MPI for biophysical chemistry, Max Planck Society, ou_578609              

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Language(s): eng - English
 Dates: 1992-10-26
 Publication Status: Published in print
 Pages: -
 Publishing info: -
 Table of Contents: -
 Rev. Method: Peer
 Identifiers: eDoc: 281390
ISI: A1992JV04100010
 Degree: -

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Title: Applied Physics Letters
  Alternative Title : Appl. Phys. Lett.
Source Genre: Journal
 Creator(s):
Affiliations:
Publ. Info: -
Pages: - Volume / Issue: 61 (17) Sequence Number: - Start / End Page: 2027 - 2029 Identifier: ISSN: 0003-6951