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Small-scale plasticity in thin Cu and Al films

MPS-Authors
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Dehm,  G.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Balk,  T. J.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Edongue,  H.
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Arzt,  E.
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;
Universität Stuttgart, Institut für Metallkunde;

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Citation

Dehm, G., Balk, T. J., Edongue, H., & Arzt, E. (2003). Small-scale plasticity in thin Cu and Al films. Microelectronic Engineering, 70(2-4), 412-424.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0010-2E21-7
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