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Rapid prototyping of Fresnel zone plates via direct Ga+ ion beam lithography for high-resolution x-ray imaging

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Keskinbora,  K.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Grévent,  C.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Eigenthaler,  U.
Scientific Staff Assembly Dual Beam, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Weigand,  M.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Schütz,  G.
Dept. Modern Magnetic Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Keskinbora, K., Grévent, C., Eigenthaler, U., Weigand, M., & Schütz, G. (2013). Rapid prototyping of Fresnel zone plates via direct Ga+ ion beam lithography for high-resolution x-ray imaging. ACS Nano, 7(11), 9788-9797. doi:10.1021/nn403295k.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0015-35CA-D
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