Control of layer growth by substrate bias

Häberle, E.; Kopecki, J.; Mutzke, A.; Schneider, R.; Schulz, A.; Walker, M.; Stroth, U.

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Control of layer growth by substrate bias

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Mutzke, A.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schneider, R.
Stellarator Theory (ST), Max Planck Institute for Plasma Physics, Max Planck Society;

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Häberle, E., Kopecki, J., Mutzke, A., Schneider, R., Schulz, A., Walker, M., et al. (2010). Control of layer growth by substrate bias. In C. McKenna (Ed.), 37th European Physical Society Conference on Plasma Physics. Contributed Papers. Geneva: European Physical Society.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0026-F25C-5

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