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Molybdenum angular sputtering distribution under low energy xenon ion bombardment

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Oyarzabal,  E.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schmid,  K.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Oyarzabal, E., Yu, J. H., Doerner, R. P., Tynan, G. R., & Schmid, K. (2006). Molybdenum angular sputtering distribution under low energy xenon ion bombardment. Journal of Applied Physics, 100: 063301. Retrieved from http://dx.doi.org/10.1063/1.2336502.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-10FB-6
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