Benner, Peter TU Chemnitz; Other publications of the MPI staff, Max Planck Institute for Dynamics of Complex Technical Systems, Max Planck Society;
Dürigen, S., Benner, P., & Stöckgen, U. (2011). Modeling and Optimal Control of Chemical Mechanical Planarization. In T. Lery, M. Primicerio, M. J. Esteban, M. Fontes, Y. Maday, V. Mehrmann, et al. (Eds.), European Success Stories in Industrial Mathematics (pp. 76). Springer-Verlag Berlin Heidelberg.