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Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas

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Pecher,  P.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Pecher, P. (1997). Quantitative Bestimmung der Teilchenflüsse aus Methan-ECR-Plasmen = Quantitative Determination of the Particle Fluxes Emanating from Methane ECR Plasmas. PhD Thesis, Universität, Bayreuth.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0027-8994-5
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