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Surface reactions during plasma-enhanced chemical vapor deposition of hydrocarbon films

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Keudell,  A. von
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Keudell, A. v. (1997). Surface reactions during plasma-enhanced chemical vapor deposition of hydrocarbon films. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 125(1-4), 323-327. doi:10.1016/S0168-583X(96)00893-2.


Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-8A18-8
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