Absolute CH Radical Density Measurements in an ECR Methane Plasma

Engelhard, M.; Jacob, W.; Moeller, W.

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Absolute CH Radical Density Measurements in an ECR Methane Plasma

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Jacob, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Moeller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Engelhard, M., Jacob, W., & Moeller, W. (1993). Absolute CH Radical Density Measurements in an ECR Methane Plasma. In J. E. Harry (Ed.), 11th International Symposium on Plasma Chemistry. Symposium Proceedings (pp. 1392-1397).

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-91CE-A

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