Collision dominated preferential sputtering of tantalum oxide

Baretzky, B.; Möller, W.; Taglauer, E.

doi:10.1016/0042-207X(92)90025-R

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Collision dominated preferential sputtering of tantalum oxide

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Möller, W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Taglauer, E.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

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Baretzky, B., Möller, W., & Taglauer, E. (1992). Collision dominated preferential sputtering of tantalum oxide. Vacuum, 43(12), 1207-1216. doi:10.1016/0042-207X(92)90025-R.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0027-9460-2

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