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Journal Article

Polymer masks on semiconductors: A novel way to nanostructures

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Haupt, M., Miller, S., Bitzer, K., Thonke, K., Sauer, R., Spatz, J. P., et al. (2001). Polymer masks on semiconductors: A novel way to nanostructures. Physica Status Solidi B, 224(3), 867-870.


Cite as: http://hdl.handle.net/11858/00-001M-0000-0029-C95A-3
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