Elemental Composition Profiling in Thin Films by Glowdischarge Mass 
Spectrometry: Depth Resolution

Coburn, J.W.; Eckstein, E.W.; Kay, E.

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Elemental Composition Profiling in Thin Films by Glowdischarge Mass Spectrometry: Depth Resolution

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Coburn, J., Eckstein, E., & Kay, E. (1975). Elemental Composition Profiling in Thin Films by Glowdischarge Mass Spectrometry: Depth Resolution. Journal of Applied Physics, 46, 7, 2828-2830.

Cite as: https://hdl.handle.net/11858/00-001M-0000-0028-B72E-B

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