Depth resolution in sputter profiling revisited

Hofmann, Siegfried; Liu, Y.; Jian, W.; Kang, H. L.; Wang, J. Y.

doi:10.1002/sia.6039

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Depth resolution in sputter profiling revisited

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Hofmann, Siegfried
Emeriti and Others, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Hofmann, S., Liu, Y., Jian, W., Kang, H. L., & Wang, J. Y. (2016). Depth resolution in sputter profiling revisited. Surface and Interface Analysis, 48(13), 1354-1369. doi:10.1002/sia.6039.

Cite as: https://hdl.handle.net/11858/00-001M-0000-002D-0839-7

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