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Bestimmung des Ionenflusses aus einem Wasserstoff-ICP-Plasma mit energiedispersiver Massenspektronomie: erste Erfahrungen mit dem PPM 422

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Schwarz-Selinger,  T.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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Plöckl,  B.
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons109489

Jacob,  W.
Surface Science (OP), Max Planck Institute for Plasma Physics, Max Planck Society;
Centre for Interdisciplinary Plasma Science (CIPS), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger, T., Plöckl, B., & Jacob, W. (2003). Bestimmung des Ionenflusses aus einem Wasserstoff-ICP-Plasma mit energiedispersiver Massenspektronomie: erste Erfahrungen mit dem PPM 422. Talk presented at 10. Erfahrungsaustausch "Oberflächentechnologie mit Plasmaprozessen". Mühlleithen. 2003-03-18 - 2003-03-20.


Cite as: https://hdl.handle.net/21.11116/0000-0000-05ED-0
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