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Quantitative Bestimmungen der massenaufgelösten Ionenflüsse aus Wasserstoff-Argon-Plasmen

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Sode,  M.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Schwarz-Selinger,  T.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Jacob,  W.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Wünderlich,  D.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Fantz,  U.
Technology (TE), Max Planck Institute for Plasma Physics, Max Planck Society;

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Sode, M., Schwarz-Selinger, T., Jacob, W., Wünderlich, D., & Fantz, U. (2010). Quantitative Bestimmungen der massenaufgelösten Ionenflüsse aus Wasserstoff-Argon-Plasmen. Talk presented at XVII. Erfahrungsaustausch Oberflächentechnologie mit Plasma- und Ionenstrahlprozessen. Mühlleithen. 2010-03-02 - 2010-03-04.


Cite as: https://hdl.handle.net/21.11116/0000-0000-5273-2
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