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Measurement of the Interfacial Shear Strength of Thin Copper Films on Sapphire by Microindentation Experiments

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Dehm,  Gerhard
Former Dept. Micro/Nanomechanics of Thin Films and Biological Systems, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Rühle,  Manfred
Former Dept. Microstructure Interfaces, Max Planck Institute for Intelligent Systems, Max Planck Society;

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Dehm, G., Raj, R., & Rühle, M. (2011). Measurement of the Interfacial Shear Strength of Thin Copper Films on Sapphire by Microindentation Experiments. In Materials Research Symposium Proceedings 1996 (Symposium I – Polycrystalline Thin Films: Structure, Texture, Properties and Applications II) (pp. 151-156). Boston, MA, USA: Materials Research Society. doi:10.1557/PROC-403-151.


Cite as: http://hdl.handle.net/21.11116/0000-0001-998F-2
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