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Engulfment control of platinum nanoparticles into oxidized silicon substrates for fabrication of dense solid-state nanopore arrays

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Kappl,  Michael
Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society;

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Müller,  Maren
Dept. Butt: Physics at Interfaces, MPI for Polymer Research, Max Planck Society;

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Kirchhoff,  Kathrin
Dept. Landfester: Physical Chemistry of Polymers, MPI for Polymer Research, Max Planck Society;

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Le-The, H., Tregouet, C., Kappl, M., Müller, M., Kirchhoff, K., Lohse, D., et al. (2019). Engulfment control of platinum nanoparticles into oxidized silicon substrates for fabrication of dense solid-state nanopore arrays. Nanotechnology, 30(6): 065301. doi:10.1088/1361-6528/aaf114.


Cite as: http://hdl.handle.net/21.11116/0000-0002-BC59-7
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