Suitable test structures for submicron ion beam analysis

Spemann, D.; Reinert, Tilo; Vogt, J.; Dobrev, D.; Butz, T.

doi:10.1016/S0168-583X(01)01253-8

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Suitable test structures for submicron ion beam analysis

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Spemann, D., Reinert, T., Vogt, J., Dobrev, D., & Butz, T. (2002). Suitable test structures for submicron ion beam analysis. Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms, 190(1-4), 312-317. doi:10.1016/S0168-583X(01)01253-8.

Cite as: https://hdl.handle.net/21.11116/0000-0004-C572-D

Abstract

For the precise determination of the sizes of submicron beam spots test structures with an excellent edge definition are required. For this purpose a semiconductor heterostructure consisting of an 1.62 @mm GaInP epi--layer grown on (001)...