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SMART: An Aberration-Corrected XPEEM/LEEM with Energy Filter

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Wichtendahl,  Ralph
Fritz Haber Institute, Max Planck Society;

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Kuhlenbeck,  Helmut
Chemical Physics, Fritz Haber Institute, Max Planck Society;

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Engel,  Wilfried
Inorganic Chemistry, Fritz Haber Institute, Max Planck Society;

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Schlögl,  Robert
Inorganic Chemistry, Fritz Haber Institute, Max Planck Society;

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Freund,  Hans-Joachim
Chemical Physics, Fritz Haber Institute, Max Planck Society;

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Bradshaw,  Alexander M.
Fritz Haber Institute, Max Planck Society;

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Citation

Wichtendahl, R., Fink, R., Kuhlenbeck, H., Preikszas, D., Rose, H., Spehr, R., et al. (1998). SMART: An Aberration-Corrected XPEEM/LEEM with Energy Filter. Surface Review and Letters, 5(6), 1249-1256. doi:10.1142/S0218625X98001584.


Cite as: http://hdl.handle.net/21.11116/0000-0007-4EFA-9
Abstract
A new UHV spectroscopic X-ray photoelectron emission and low energy electron microscope is presently under construction for the installation at the PM-6 soft X-ray undulator beamline at BESSY II. Using a combination of a sophisticated magnetic beam splitter and an electrostatic tetrode mirror, the spherical and chromatic aberrations of the objective lens are corrected and thus the lateral resolution and sensitivity of the instrument improved. In addition a corrected imaging energy filter (a so-called omega filter) allows high spectral resolution (ΔE=0.1 eV) in the photoemission modes and back-ground suppression in LEEM and small-spot LEED modes. The theoretical prediction for the lateral resolution is 5 Å; a realistic goal is about 2 nm. Thus, a variety of electron spectroscopies (XAS, XPS, UPS, XAES) and electron diffraction (LEED, LEEM) or reflection techniques (MEM) will be available with spatial resolution unreached so far.