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Journal Article

Shadow evaporation method for fabrication of sub 10 nm gaps between metal electrodes.

MPS-Authors
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Philipp,  G.
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Burghard,  M.
Department Nanoscale Science (Klaus Kern), Max Planck Institute for Solid State Research, Max Planck Society;

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Weis,  J.
Scientific Facility Nanostructuring Lab (Jürgen Weis), Max Planck Institute for Solid State Research, Max Planck Society;
Abteilung v. Klitzing, Former Departments, Max Planck Institute for Solid State Research, Max Planck Society;

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Citation

Philipp, G., Weimann, T., Hinze, P., Burghard, M., & Weis, J. (1999). Shadow evaporation method for fabrication of sub 10 nm gaps between metal electrodes. Microelectronic Engineering, 46, 157-160.


Cite as: https://hdl.handle.net/21.11116/0000-000E-DDFC-E
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