Design and realization of a sputter deposition system for the in situ- and in 
operando-use in polarized neutron reflectometry experiments

Schmehl, A.; Mairoser, T.; Herrnberger, A.; Stephanos, C.; Meir, S.; Förg, B.; Wiedemann, B.; Böni, P.; Mannhart, J.; Kreuzpaintner, W.

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Design and realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments

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Mannhart, J.
Department Solid State Quantum Electronics (Jochen Mannhart), Max Planck Institute for Solid State Research, Max Planck Society;

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Citation

Schmehl, A., Mairoser, T., Herrnberger, A., Stephanos, C., Meir, S., Förg, B., et al. (2018). Design and realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments. Nuclear Instruments and Methods in Physics Research A, 883, 170-182.

Cite as: https://hdl.handle.net/21.11116/0000-000E-E0A1-E

Abstract

We report on the realization of a sputter deposition system for the in situ- and in operando-use in polarized neutron reflectometry experiments. Starting with the scientific requirements, which define the general design considerations, the external limitations and boundaries imposed by the available space at a neutron beamline and by the neutron and vacuum compatibility of the used materials, are assessed. The relevant aspects are then accounted for in the realization of our highly mobile deposition system, which was designed with a focus on a quick and simple installation and removability at the beamline. Apart from the general design, the in-vacuum components, the auxiliary equipment and the remote control via a computer, as well as relevant safety aspects are presented in detail. (c) 2017 Elsevier B.V. All rights reserved.