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Silver Metallization with Reactively Sputtered TiN Diffusion Barrier Films

MPS-Authors
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Linsmeier,  Ch.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Balden,  M.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

/persons/resource/persons110800

Wiltner,  A.
Material Research (MF), Max Planck Institute for Plasma Physics, Max Planck Society;

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Citation

Gao, L., Gstöttner, J., Emling, R., Linsmeier, C., Balden, M., Wiltner, A., et al. (2004). Silver Metallization with Reactively Sputtered TiN Diffusion Barrier Films. Talk presented at 2004 MRS Spring Meeting. San Francisco,CA. 2004-04-12 - 2004-04-16.


Cite as: https://hdl.handle.net/21.11116/0000-0000-07D7-6
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